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6CCVD Research

Advancements in lamb wave high-frequency devices using diamond-like carbon (DLC) coatings

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2025-01-21
JournalChemical Physics Impact
AuthorsJatinder Pal Singh, Ajay K. Sao, Babita Sharma, S. C. Garg, Anjali Sharma

Abstract

Section titled ā€œAbstractā€

Diamond-like carbon (DLC) stands as a material of profound scientific and technological importance, owing to its exceptional blend of mechanical, tribological, and chemical properties. Lamb wave devices, vital in sensing, communication, and structural health monitoring, require efficient surface acoustic wave (SAW) propagation for their diverse applications. Theoretical studies suggest that DLC coatings can accelerate SAWs due to their high elastic constant and low mass density, making them highly desirable for enhancing SAW device performance. In the present work, a process for reliable deposition of DLC films on the SiO2/Si membrane has been investigated, aiming to optimize their functionality. MEMS (micro-electromechanical system) technology was adopted for the development of SiO2/Si membrane-based Lamb wave devices utilising piezoelectric ZnO thin film and high-velocity DLC coating. The DLC films were coated on the SiO2/Si membrane using the Hot Filament Chemical Vapor Deposition (HFCVD) method followed by deposition of a piezoelectric layer of ZnO film through RF magnetron sputtering. The patterning of aluminium electrodes for the fabrication of Lamb wave devices was carried out using lithography. The frequency response of the Lamb wave devices prepared without and with DLC coatings was studied and it was found that the Lamb wave devices without DLC coatings showed a return loss of -27.97 dB at a frequency of 286 MHz. However, with the incorporation of DLC coating, the frequency increased to 345 MHz with a lower return loss of -19.46 dB. The outcomes of this research underscore the potential of DLC coatings to optimize the Lamb wave device functionalities, promising enhanced performance and broader applications. Continued exploration and refinement in this field hold promise for further enhancing DLC coatings and broadening the scope of Lamb wave device applications.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
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  2. 2010 - High-frequency lamb wave device composed of MEMS structure using LiNbO 3 thin film and air gap [Crossref]
  3. 2020 - Environmental and operational conditions effects on Lamb wave based structural health monitoring systems: a review [Crossref]
  4. 2022 - Lamb waves-based technologies for structural health monitoring of composite structures for aircraft applications [Crossref]
  5. 2013 - Thin film Lamb wave resonators in frequency control and sensing applications: a review [Crossref]
  6. 2006 - Optimization of SAW sensors with a structure ZnO-SiO2-Si to detect volatile organic compounds [Crossref]
  7. 2005 - Temperature stability of ZnO thin film SAW device on fused quartz [Crossref]
  8. 2004 - Fabrication and characterization of high frequency SAW device with IDT/ZnO/AlN/Si configuration: role of AlN buffer [Crossref]
  9. 2021 - Properties and classification of diamond-like carbon films [Crossref]
  10. 1992 - Properties of diamond-like carbon [Crossref]

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