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6CCVD Research

kV-class vertical p-n heterojunction rectifier based on ITO/diamond

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2025-01-27
JournalApplied Physics Letters
AuthorsHsiao-Hsuan Wan, Chao-Ching Chiang, Jian-Sian Li, F. Ren, S. J. Pearton
InstitutionsUniversity of Florida
Citations1

Abstract

Section titled ā€œAbstractā€

Indium tin oxide (ITO) layers were sputter-deposited onto commercially available vertical p/p+ diamond structures consisting of 5 Ī¼m thick p-type (1.3 Ɨ 1016 cmāˆ’3) drift layers deposited by chemical vapor deposition on 250 Ī¼m thick heavily B-doped (3 Ɨ 1020 cmāˆ’3) single crystal substrates. The ITO is found to form a type II band alignment allowing Ohmic contact to the p-type diamond and creating a vertical n-p heterojunction. The maximum reverse breakdown of heterojunction rectifiers was āˆ¼1.1 kV, with an on-resistance (RON) of 13 mā„¦ Ā· cm2, leading to a power figure of merit of 99.3 MW/cm2. The on-voltage was 1.4 V, diode ideality factor was 1.22, with a reverse recovery time of 9.5 ns for 100 Ī¼m diameter rectifiers. The on/off ratios when switching from āˆ’5 V forward to 100 V reverse were in the range of 1011-1012. This is a simple approach for realizing high performance vertical diamond-based rectifiers for power switching applications.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
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  4. 2020 - Growth of high-quality one-inch free-standing heteroepitaxial (001) diamond on (110) sapphire substrate [Crossref]
  5. 2021 - Dislocation density reduction using overgrowth on hole arrays made in heteroepitaxial diamond substrates [Crossref]
  6. 2019 - High crystalline quality heteroepitaxial diamond using grid patterned nucleation and growth on Ir [Crossref]
  7. 2024 - High current density diamond photoconductive semiconductor switches with a buried, metallic conductive channel [Crossref]
  8. 1983 - High voltage optoelectronic switching in diamond [Crossref]

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