Long-term frequency stabilization of MEMS oscillators based on axial force feedback control
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2025-07-23 |
| Journal | Journal of Vibration and Control |
| Authors | Zihan Jin, Donglei Weng, Hong Jiang, Xuefeng Wang, Zhan Shi |
| Institutions | Xiāan Jiaotong University, Westlake University |
Abstract
Section titled āAbstractāThe frequency stability of MEMS oscillators is critical for delivering precise and reliable reference signals in electronic devices. This paper proposes a long-term frequency stabilization method for MEMS oscillators based on axial force feedback control. A symmetric diamond-shaped MEMS oscillator with an integrated axial force amplifier is designed and a PID-based frequency controller is employed to implement the strategy. The controller generates a control voltage based on the measured frequency, which, in turn, produces an electrostatic force via the end-capacitor to dynamically adjust the resonatorās axial force, ensuring frequency stability. Experimental results reveal that the proposed method achieves a significant enhancement in long-term frequency stability, improving it by over 27,000 times over a period of 7200 seconds. Additionally, the controller compensates for frequency fluctuations caused by environmental temperature variations in real time, achieving a frequency stability improvement of five orders of magnitude.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
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