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6CCVD Research

Effect of Argon Addition on Single Crystal Diamond Synthesized by Microwave Plasma CVD

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2015-01-01
AuthorsXiaoqi Lin, Man Weidong, Lv Jilei, Wei Zhang, Nan Jiang

Abstract

Section titled ā€œAbstractā€

Single crystal diamond was grown by 6 kW stainless steel resonant cavity type MPCVD with Ar/ H_2/CH_4 gas mixture,keep the total pressure and Ar flow constant,the effect of Ar/H_2 ratio on the growth rate and crystal quality of single crystal diamond were studied by Raman spectroscopy and XRD rocking curve.The results show that the growth rate of single crystal diamond increases and the crystal quality hasn ā€˜t been damaged with proper Ar addition.The maximum growth rate of single crystal diamond is 35 mum/h when Ar/H_2 ratio is 30%.With the amount of Ar addition increasing,the quality of single crystal changed worse,and a very high ratio of Ar/H_2 will heavily damage the growth process of single crystal diamond.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

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