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Preparation of CuO-Ta<SUB>2</SUB>O<SUB>5</SUB> Composites Using a Simple Co-Sputtering Method

MetadataDetails
Publication Date2015-01-01
JournalJournal of Materials Science and Chemical Engineering
AuthorsKenta Miura, T. Osawa, Yuya Yokota, Zobaer Hossain, Osamu Hanaizumi
InstitutionsKiryu University, Gunma University
Citations4

We prepared CuO-Ta2O5 composite films using our simple co-sputtering method for the first time. Four specimens were prepared from an as-deposited CuO-Ta2O5 sample by cutting it using a diamond- wire saw, and the specimens were subsequently annealed at 600°C - 900°C. The X-ray diffraction and photoluminescence (PL) of the annealed specimens were evaluated. The CuO-Ta2O5 film annealed at 600°C seemed to be primarily amorphous phase, and a sharp PL peak at a wavelength of 450 nm, due to the existence of Cu2+, was observed from the film. In contrast, the CuO-Ta2O5 films annealed at 700°C, 800°C, and 900°C seemed to be tetragonal CuTa2O6 phases. We expect that good-quality CuTa2O6 films can be obtained using our very simple co-sputtering method and subsequent annealing above 900°C. Such CuTa2O6 films can be used in chemisorptions conductometric gas sensors.