Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by Boron
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2015-01-01 |
| Journal | Advances in Materials Science and Engineering |
| Authors | Xiaoyan Wang, Yuqing Zhao |
| Institutions | Taiyuan University of Science and Technology, Xiāan Jiaotong University |
| Citations | 7 |
Abstract
Section titled āAbstractāA type of tetrahedral amorphous carbon (ta-C) film that was doped by boron (ta-C:B) is focused on in this paper. The ta-C film is prepared by filtered cathodic vacuum arc (FCVA) technique and then doped with boron using the thermal diffusion method. Then the microcosmic structure and electrical conductivity of the ta-C are characterized by an X-ray photoelectron spectroscopy (XPS) method and four-probe method, respectively. The results show that the conductivity of ta-C:B is significantly increased; the resistivity decreases from 1.5 Ć 10 6 Ī©Ā·cm to 350 Ī©Ā·cm approximately, while the percentage of sp 3 bonds in the film is changed from 87% to 60% approximately. It means that this type of film preserved the mechanical characteristics of diamond-like carbon (DLC) films and improved the electrical characteristics greatly at the same time.