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Radiofrequency performance of hydrogenated diamond MOSFETs with alumina

MetadataDetails
Publication Date2019-02-11
JournalApplied Physics Letters
AuthorsChongwu Zhou, J. J. Wang, Jianchao Guo, Cui Yu, Ze He
InstitutionsHebei Semiconductor Research Institute
Citations32

Hydrogenated diamond MOSFETs with self-oxidized alumina as a gate dielectric are fabricated. The diamond MOSFETs show a high maximum drain current density of 466 mA/mm at VGS = āˆ’6 V, a transconductance of 58 mS/mm, and an off-state breakdown voltage of āˆ’53 V. The maximum output power density reaches 745 mW/mm at 2 GHz continuous wave, which is the highest reported value for diamond transistors measured at 2 GHz. The output power value measured is lower than that estimated. Pulse I-V analysis shows that the main factor that affects the output power of the diamond MOSFETs is the traps in the channel.