A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2015-11-18 |
| Journal | Journal of Micromechanics and Microengineering |
| Authors | Abdelkrim Talbi, Leticia Gimeno, Jean-Claude Gerbedoen, R. Viard, A. Soltani |
| Institutions | Czech Academy of Sciences, Institute of Physics, Office National dāĆtudes et de Recherches AĆ©rospatiales |
| Citations | 28 |
Abstract
Section titled āAbstractāA linear array of microscale thermal anemometers has been designed, fabricated and characterized. The sensitive element consists of a self-compensated-stress multilayer (Ni/W) patterned to form a wire with length, width, and thickness close to 200 Ī¼m, 5 Ī¼m and 2 Ī¼m respectively. The wire is deposited and supported by prongs made of nano-crystalline diamond (NCD) of about 2 Ī¼m in thickness. Due to its high Youngās modulus, NCD allows a very high mechanical toughness without the need for thicker support for the hot wire. Also, depending on grain size, the NCD is able to present thermal conductivity smaller than 10 W mKā1, providing good thermal insulation from the substrate and less conductive end losses to the prongs. The sensor was characterized experimentally. Its electrical and thermal properties were obtained first in the absence of fluid flow. The results confirm the effectiveness of thermal insulation and the mechanical robustness of the structure. The fluidic characterizations were performed and analysed in the case of an airflow with velocities of up to 30 m sā1.