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Fabricating Nano-Texture on Diamond-Wire Saw Multi-Crystalline Silicon Using RIE-Etch

MetadataDetails
Publication Date2016-01-01
JournalEU PVSEC
AuthorsHuihua Shu, Jiayi Zheng, Qi Huang, Cui-zhong Zhang, Jian Sheng

Deficiency of texturing technique impedes the upgrade of multi-diamond-wire saw silicon (MDWS) solar cell to commercial production. In this paper, Nano-textured was applied on diamond-wire saw multi-crystalline silicon by RIE etching technique. The resultant unique pyramidal nanostructures give advantages of both light-trapping and electric properties of silicon solar cells. Finally the silicon solar cells achieved an average efficiency of 18.70%, which gains an efficiency of 0.44% from silicon solar cells with micron-textured. In particular, the best efficiency of RIE 400nm-MDSS achieved 19.1%, the short circuit current achieved 290mA. In terms of the open circuit voltages, the influence of the Nano-textured size on the efficiency also has been investigated. It indicates that a larger texture size gives a higher open circuit voltage.