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Formation of Nitrogen-Vacancy Centers in Homoepitaxial Diamond Thin Films Grown via Microwave Plasma-Assisted Chemical Vapor Deposition

MetadataDetails
Publication Date2016-05-09
JournalIEEE Transactions on Nanotechnology
AuthorsHideyuki Watanabe, Hitoshi Umezawa, T. Ishikawa, Kazuki Kaneko, Shinichi Shikata
InstitutionsKeio University, The University of Tokyo
Citations5

A model for controlling the two-dimensional distribution of negatively charged nitrogen-vacancy (NV <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;-&lt;/sup> ) fluorescent centers near the surface of a diamond crystal is presented, using only a microwave plasma-assisted chemical vapor deposition (CVD) method. In this approach, a CVD diamond layer is homoepitaxialy grown via microwave plasma-assisted CVD using an isotopically enriched methane ( <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;12&lt;/sup> CH4), hydrogen (H2), and nitrogen (N2) gas mixture on patterned diamond (0 0 1). When the surface is imaged by means of confocal microscope photoluminescence mapping, fine grooves are observed to have been generated artificially on the diamond surface. NV <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;-&lt;/sup> centers are found to be distributed selectively into these grooves. These results demonstrate an effective means for the formation of NV <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;-&lt;/sup> centers of selectable size and density via microwave plasma-assisted CVD, with potential application in the production of diamond quantum sensors.

  1. 2002 - High-quality homoepitaxial diamond film growth