Preparation of Titanium-Doped Diamond-Like Carbon Films With Electrical Conductivity Using High Power Pulsed Magnetron Sputtering System With Bipolar Pulse Voltage Source for Substrate
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2016-07-19 |
| Journal | IEEE Transactions on Plasma Science |
| Authors | Takashi Kimura, Hikaru Kamata, Setsuo Nakao, Kingo Azuma |
| Institutions | University of Hyogo, National Institute of Advanced Industrial Science and Technology |
| Citations | 12 |
Abstract
Section titled āAbstractāTitanium-doped diamond-like carbon (DLC) films with electrical conductivity are prepared by plasma-enhanced chemical vapor deposition using high-density pulsed Ar/C2H2 plasmas. Those plasmas are produced by high-power pulsed magnetron sputtering (HPPMS) system, whereas the titanium dope into the DLC films is carried out through titanium sputtering. A bipolar pulse voltage source is connected to the substrate and its holder. The HPPMS plasma temporally evolves during a pulseon time of an HPPMS power source after the discharge is ignited. Then, the negative pulse voltage with a magnitude of 1.5 kV is applied for 10 Ī¼s before the application of the positive pulse voltage with the magnitude lower than 1 kV and the pulsewidth of 10-15 Ī¼s. The fraction of the intensity related to sp <sup xmlns:mml=āhttp://www.w3.org/1998/Math/MathMLā xmlns:xlink=āhttp://www.w3.org/1999/xlinkā>2</sup> carbon bond in X-ray photoelectron spectroscopy (XPS) C 1s spectrum is ~80% or more for any film. On the other hand, the fraction of the intensity related to sp <sup xmlns:mml=āhttp://www.w3.org/1998/Math/MathMLā xmlns:xlink=āhttp://www.w3.org/1999/xlinkā>3</sup> carbon bond is ~20%, resulting in the preparation of the films with moderate hardness. The fraction of the intensity related to the titanium component in the overall XPS spectrum is lower than 8%, whereas that of titanium-carbon bond component in the overall XPS spectrum is lower than 1.5%. The conductivity of the prepared films markedly increases to 609 S/cm and its value depends on the amount of titanium-carbon bond. On the other hand, the film hardness ranges between 10 and 15 GPa and it does not strongly depend on the content of titanium.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
Section titled āReferencesā- 2006 - Electrically conductive diamond-like carbon coatings prepared by plasma-based ion implantation with bipolar pulses