AFM study of 2D resonators based on Diamond-Like-Carbon
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2016-08-01 |
| Authors | S. Thibert, Anne Ghis, M. Delaunay |
| Institutions | Institut Nanosciences et Cryogénie, Institut polytechnique de Grenoble |
| Citations | 2 |
Abstract
Section titled âAbstractâThis paper focuses on the study of an ultrathin Diamond-Like-Carbon layer acting as the mobile part of 2D microresonators. To overcome the low electrical conductivity of amorphous carbon, DLC is used in combination with few nanometer-thick metal layers to manufacture 15 to 20 nm thick membranes suspended over 0.8 to 2.3 ÎŒm wide trenches. After a description of the experimental means performed on these samples, the measurements of resonance frequencies ranging from 30 MHz to 88 MHz are described. Furthermore, the experimental observation of 2D vibration modes is reported, which opens the path for the development of a new kind of devices.
Tech Support
Section titled âTech SupportâOriginal Source
Section titled âOriginal SourceâReferences
Section titled âReferencesâ- 1998 - Electron cyclotron resonance plasma ion source for material depositions [Crossref]