Processing and mechanical characterization of ultrananocrisytalline diamond films for MEMS applications
At a Glance
Section titled “At a Glance”| Metadata | Details |
|---|---|
| Publication Date | 2017-10-01 |
| Authors | Cristina Pachiu, C. Tibeică, Andrei Avram, L. Monica Veca, Titus Sandu |
| Institutions | National Institute for Research and Development in Microtechnologies |
| Citations | 1 |
Abstract
Section titled “Abstract”We present the fabrication and mechanical characterization of MEMS-like structures from ultrananocrystalline diamond UNCD thin films. Various microstructures were fabricated using lithography and RIE processing, that is, by avoiding the sacrificial layer process. Stress assessments indicate the usability of UNCD films for MEMS components.