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Heteroepitaxial Diamond Field-Effect Transistor for High Voltage Applications

MetadataDetails
Publication Date2017-11-30
JournalIEEE Electron Device Letters
AuthorsMohd Syamsul, Nobutaka Oi, S. Okubo, Taisuke Kageura, Hiroshi Kawarada
InstitutionsWaseda University
Citations24

The exceptional performance of diamondbased field-effect transistor technology is not restricted to devices that use single crystallinediamond alone. This letter explores the full potential of the heteroepitaxial diamond field-effect transistor (HED-FET). HED-FET devices were fabricated with a long gate-drain length (L <sub xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;GD&lt;/sub> ) configuration using C-H bonded channels, and a high maximum current density of 80 mA/mm and a high I <sub xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;ON&lt;/sub> /I <sub xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;OFF&lt;/sub> ratio of 10 <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;9&lt;/sup> were achieved. Additionally, the HED-FETs showed an average breakdown voltage of ≥500 V and comparatively high breakdown voltage of more than 1 kV. This letter represents a significant step toward the realization of the potential of widely available heteroepitaxial diamond for use in FET applications.