UV-photodetector based on NiO/diamond film
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2018-01-15 |
| Journal | Applied Physics Letters |
| Authors | Xiaohui Chang, Yanfeng Wang, Xiaofan Zhang, Zhangcheng Liu, Jiao Fu |
| Institutions | Hebei Semiconductor Research Institute, Xiâan Jiaotong University |
| Citations | 50 |
Abstract
Section titled âAbstractâIn this study, a NiO/diamond UV-photodetector has been fabricated and investigated. A single crystal diamond (SCD) layer was grown on a high-pressure-high-temperature Ib-type diamond substrate by using a microwave plasma chemical vapor deposition system. NiO films were deposited directly by the reactive magnetron sputtering technique in a mixture gas of oxygen and argon onto the SCD layer. Gold films were patterned on NiO films as electrodes to form the metal-semiconductor-metal UV-photodetector which shows good repeatability and a 2 orders of magnitude UV/visible rejection ratio. Also, the NiO/diamond photodetector has a higher responsivity and a wider response range in contrast to a diamond photodetector.