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6CCVD Research

Influence of surface crystal-orientation on transfer doping of V2O5/H-terminated diamond

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2018-04-30
JournalApplied Physics Letters
AuthorsC. Verona, F. Arciprete, M. Foffi, Ernesto Limiti, M. Marinelli
InstitutionsInstitute of Structure of Matter, University of Rome Tor Vergata
Citations29

Abstract

Section titled ā€œAbstractā€

Surface transfer doping of hydrogen-terminated diamond induced by high work function V2O5 oxide was investigated on samples with (100) and (111) surface crystal-orientations. An enhancement of sheet hole density and a decrease in sheet resistance were obtained in the case of (111) diamond as compared to (100). In particular, a sheet resistance as low as 1.8 kĪ©/ā—» and a sheet hole concentration of 1.1 Ɨ 1014 cmāˆ’2 were obtained by Hall effect measurements for V2O5/H-(111) oriented diamonds, the latter being about twice as high as the one obtained for V2O5/H-(100) oriented diamonds. This was confirmed by capacitance-voltage measurements on metal/V2O5/H-diamond diodes fabricated on the investigated samples, also resulting in the determination of the depth profiles of hole accumulation layers at the diamond surface. X-ray photoelectron spectroscopy measurements of the C1s core level shift were used to determine the differences in surface band bending, leading to a different hole accumulation layer formation efficiency at the V2O5/H-diamond interface. An upward band bending of 0.7 eV and 0.3 eV in response to the surface transfer doping induced by a 10 ƅ thick V2O5 layer was measured for (111) and (100) diamond surfaces, respectively. This is a further confirmation that V2O5 is more effective in surface transfer doping for H-(111) oriented diamond. The obtained results are very promising in view of the development of high-power metal oxide field effect transistors based on the H-diamond surface.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2014 - CVD diamond-Research, applications, and challenges [Crossref]
  2. 2009 - CVD Diamond for Electronic Devices and Sensors

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