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6CCVD Research

Realization of deep 3D metal electrodes in diamond radiation detectors

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2018-05-28
JournalApplied Physics Letters
AuthorsThomas Wulz, William Gerding, Nickolay V. Lavrik, Dayrl P. Briggs, Bernadeta Srijanto
InstitutionsUniversity of Tennessee at Knoxville, Oak Ridge National Laboratory
Citations10

Abstract

Section titled ā€œAbstractā€

A fabrication technique to create 3D diamond detectors is presented. Deep reactive ion etching was used to create an array of through-diamond vias (TDVs) in a 2 Ɨ 2 Ɨ 0.15 mm3 electronic grade single crystal diamond detector. The diameter of the TDVs was nominally 30 Ī¼m with a pitch of 100 Ī¼m between them. The TDVs were filled with chromium using hexavalent chromium electroplating to create 3D electrodes, which were connected electrically by interdigitated electrodes. The fabricated 3D diamond detector responded to both alpha particles and X-rays, exhibiting a charge collection efficiency of 52.3% at 200 V. Comparing to a diamond detector with the same interdigitated electrodes, but no 3D electrodes, confirms that the 3D electrodes are electrically active within the device. The average resistivity of the 3D electrodes is 2.89 Ā± 0.03 Ɨ 10āˆ’5 Ī© cm, near that of bulk chromium. These results indicate that this fabrication technique is a potential option for 3D diamond detector fabrication.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2013 - A novel detector with graphitic electrodes in CVD diamond [Crossref]
  2. 2013 - Laser-processed three dimensional graphitic electrodes for diamond radiation detectors [Crossref]
  3. 2014 - Electrical and Raman-imaging characterization of laser-made electrodes for 3D diamond detectors [Crossref]
  4. 2014 - All-carbon detector with buried graphite pillars in CVD diamond [Crossref]
  5. 2015 - A 3D diamond detector for particle tracking [Crossref]
  6. 2014 - A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors [Crossref]
  7. 2015 - Radiation hardness of three-dimensional polycrystalline diamond detectors [Crossref]
  8. 2000 - Laser-induced graphitization on a diamond (111) surface [Crossref]
  9. 2003 - Early stages of laser graphitization of diamond [Crossref]
  10. 2009 - Femtosecond laser writing of buried graphitic structures in bulk diamond [Crossref]

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