Enhancement of Optical Quality Factor by Thermal Annealing of Single Crystal Diamond Micro-Resonators
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2018-07-01 |
| Authors | Teodoro Graziosi, Sichen Mi, Marcell Kiss, Niels Quack |
| Institutions | Ăcole Polytechnique FĂ©dĂ©rale de Lausanne |
| Citations | 1 |
Abstract
Section titled âAbstractâWe report on the increase in optical quality factor of a suspended single crystal diamond micro-disk resonator by thermal annealing. The resonators are fabricated by Deep Reactive Ion Etching (DRIE) to obtain circular pillars in bulk single crystal diamond, followed by multidirectional Focused Ion Beam (FIB) milling to shape the anchor, thin the micro disk and smooth the sidewalls. Thermal annealing in air at 500 degrees C for 4 h eliminates FIB induced crystal damage yielding optical quality factors of up to 5â700, corresponding to an increase of up to 5x compared to the resonators before annealing.
Tech Support
Section titled âTech SupportâOriginal Source
Section titled âOriginal SourceâReferences
Section titled âReferencesâ- 2015 - High- Q / V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching [Crossref]
- 2014 - Single-crystal diamond nanomechanical resonators with quality factors exceeding one million [Crossref]