Evaluation of AFM polishing technique by optical fiber end face nano-micromachining
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2019-01-01 |
| Journal | The Proceedings of Conference of Kanto Branch |
| Authors | Shinsuke Matsui, Kenoshin KIMURA |
| Institutions | Chiba Institute of Technology |
Abstract
Section titled āAbstractāNano-micro scratch machining was done by Atomic force microscopy (AFM) to investigate the fundamental characteristics of the polishing. The machining was done with an AFM tip which can be assumed to a nano-shape cutting edge of an abrasive, and with the machining load which is controlled by the AFM cantilever system. Tip driving by AFM system is enabling to use a well-defined trajectory. The tips of SiO2, Al2O3, ZrO2, and diamond were used as AFM tips to simulate ordinary polishing. The machining environment was water changing its pH; 7 to 11.0. Furthermore, the machining damage was estimated by the optical return loss measurement of optical fiber end on which the machining was done. The material of optical fiber is SiO2. The wear of tips was also measured with FE-SEM. As a result, the several chemical effects of environmental liquid and tip material to SiO2 machining were revealed.