Giant Reflection Coefficient on Sc0.26Al0.74N Polycrystalline Diamond Surface Acoustic Wave Resonators
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2019-08-02 |
| Journal | physica status solidi (a) |
| Authors | Miguel SinusĂa Lozano, Zhuohui Chen, Oliver A. Williams, G.F. Iriarte |
| Institutions | Huawei Technologies (Canada), Cardiff University |
| Citations | 6 |
Abstract
Section titled âAbstractâSince the commercialization of surface acoustic wave (SAW) devices, the technology is steadily increasing the device performances without compromising their power handling, size and price. Herein, oneâport SAW resonators are fabricated on scandium aluminum nitride (Sc 0.26 Al 0.74 N)/polycrystalline diamond heterostructures. SAW propagation properties are studied using three different piezoelectric thinâfilm thicknesses within the heterostructure. The Rayleigh and Sezawa resonance frequencies are above 1.5 and 2.5 GHz, respectively, achieving Sezawa mode reflection coefficients below â50 dB. The polycrystalline diamond substrate is synthesized by microwave plasma chemical vapor deposition (MPCVD) on top of a 500 ÎŒmâthick Si (001) substrate. The Sc 0.26 Al 0.74 N thin films are synthesized by reactive sputtering at nominally room temperature. The thin filmâs composition is analyzed by Rutherford backscattering spectrometry (RBS). The full width at half maximum (FWHM) of the Xâray diffraction (XRD) Ï scans below 3° indicates that the synthesized Sc 0.26 Al 0.74 N thin films are highly c âaxis oriented. The electromechanical coupling coefficient, quality factor, and dielectric loss parameters are computed by curve fitting the device electrical measurements to the simulation results of a modified Butterworth Van Dyke (mBVD) model implemented in the advance design system (ADS) tool.
Tech Support
Section titled âTech SupportâOriginal Source
Section titled âOriginal SourceâReferences
Section titled âReferencesâ- 1972 - Physical Acoustics