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One-port SAW resonator on diamond made of isotopically enriched 12C

MetadataDetails
Publication Date2019-10-01
AuthorsSatoshi Fujii, Tokuyuki Teraji, Takahiro Shimaoka, Kimiyoshi Ichikawa, Satoshi Koizumi
InstitutionsNational Institute for Materials Science, National Institute of Technology Okinawa College

We herein investigated surface acoustic wave (SAW) filters made of diamond and demonstrated that SAW resonators of 5 GHz band can be easily realized. Diamond has been previously studied for application in power devices and quantum computers. In particular, <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;12&lt;/sup> C diamond has been applied to quantum computers using nitrogen-vacancy (NV) centers. We fabricated a SAW resonator for <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;12&lt;/sup> C isotopically enriched diamond. Our resonator has a resonance frequency of 6 GHz and an anti-communicating frequency of 13 GHz. In the case of the Sezawa mode, the sound speed increased by 30%. We also found that the Young’s modulus doubled with the removal of a small percentage of <sup xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;13&lt;/sup> C. However, the reason for high coupling factor is yet to be discovered.