SU-8 Based Glass Microfluidic Device Coated with Deposited Nano-Layer for Future Fabrication of Nanofluidic Microelectromechanical Systems
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2020-01-01 |
| Journal | International Journal of Nanomaterials and Nanostructures |
| Authors | Subhadeep Mukhopadhyay |
| Institutions | National Institute of Technology Arunachal Pradesh |
Abstract
Section titled āAbstractāTwo SU-8 based glass microfluidic devices are fabricated by maskless lithography and laboratory-made clamping. The inner walls of one device are coated with nano-layer of diamond like carbon (DLC) using the plasma enhanced chemical vapour deposition (PECVD) system. The other device is remained uncoated. A CMOS camera catching 25 frames per second with a corresponding time-scale resolution of 0.04 second is used to record each surface-driven microfluidic flow of dyed water. This work may be suitable as an idea to fabricate the nanofluidic microelectromechanical systems (MEMS) in future
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal Sourceā- DOI: None