Heat resistance properties of various boron-doped diamond films prepared via hot filament chemical vapor deposition
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2020-03-16 |
| Journal | Modern Physics Letters B |
| Authors | Mun Ki Bae, Chi Hwan Kim, Yeong Min Park, Su-Jong Yoon, Tae Gyu Kim |
| Institutions | Pusan National University |
| Citations | 1 |
Abstract
Section titled āAbstractāWe used hot filament chemical vapor deposition to synthesize conductive diamond layers. Scanning electron microscopy (SEM), Raman spectroscopy, and X-ray diffraction (XRD) were employed to explore how boron affected diamond formation in terms of structural chemistry, surface appearance, and growth rate. As the boron/carbon (B/C) ratio increased, thin boron-doped diamonds (BDDs) exhibited increased levels of amorphous carbon. We used a high-temperature furnace to explore the heat resistance of BDDs.