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Novel Ultra Localized and Dense Nitrogen Delta-Doping in Diamond for Advanced Quantum Sensing

MetadataDetails
Publication Date2020-05-01
JournalNano Letters
AuthorsTzach Jaffe, Mohammed Attrash, Mohan Kumar Kuntumalla, Roza Akhvlediani, Shaul Michaelson
InstitutionsUniversity of Kassel, Technion – Israel Institute of Technology
Citations29

We introduce and demonstrate a new approach for nitrogen-vacancy (NV) patterning in diamond, achieving a deterministic, nanometer-thin, and dense delta-doped layer of negatively charged NV centers in diamond. We employed a pure nitridation stage using microwave plasma and a subsequent <i>in situ</i> diamond overgrowth. We present the highest reported nitrogen concentration in a delta-doped layer (1.8 Ɨ 10<sup>20</sup> cm<sup>-3</sup>) while maintaining the pristine diamond crystal quality. This result combined with the large optically detected magnetic resonance contrast can pave the way toward highly sensitive NV-based magnetometers. We further employed this delta-doping technique on high-quality fabricated diamond nanostructures for realizing a topographic NV patterning in order to enhance the sensing and hyperpolarization capabilities of NV-based devices.