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6CCVD Research

Synthesis of Multilayered Diamond Films in Microwave Plasma with Periodic Nitrogen Injections

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2021-02-01
JournalDoklady Physics
AuthorsArtem Martyanov, Vadim Sedov, E.V. Zavedeev, Sergey Savin, V.G. Ralchenko
InstitutionsMIREA - Russian Technological University, Prokhorov General Physics Institute

Abstract

Section titled ā€œAbstractā€

The use of polycrystalline diamond in optics (transparent windows) and electronics (heat sinks) usually requires polishing of a synthesized wafer. However, mechanical polishing of diamond faces certain difficulties, since it is a material with a record high hardness. In this study, we propose a new approach to forming low-roughness diamond layers by periodic time-limited adding (injection) of nitrogen into the standard methaneā€’hydrogen (CH4-H2) gas mixture. Nitrogen stimulates secondary nucleation on the formed well-faceted micrometer diamond grains, which prevents their further growth. The transition from a continuous supply of N2 to short-term injections prevents the formation of continuous nanocrystalline diamond layers and makes it possible to grow high-quality microcrystalline diamond layers between the nitrogen injection periods.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2020 - Quantum Materials and Technologies on the Nanometer Scale

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