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On the Breakdown Voltage Temperature Dependence of High-Voltage Power Diode Passivated with Diamond-Like Carbon

MetadataDetails
Publication Date2021-09-01
AuthorsLuigi Balestra, Susanna Reggiani, A. Gnudi, Elena Gnani, J. Dobrzynska
InstitutionsUniversity of Bologna, Czech Technical University in Prague

Diamond-Like Carbon (DLC) is well established material for the passivation of high voltage negative beveled power diode. In our previous works, the conduction mechanism of the DLC has been carefully described through the characterization and the physical modeling of Metal-Insulator-Semiconductor (MIS) structures. In addition, the effects on the breakdown voltage and leakage current have been clarified comparing the available experiments with numerical simulations. However, the role played by the DLC on the breakdown voltage temperature dependence is still lacking. In this work, it has been investigated assuming a release of the trapped charges with increasing temperatures.