The mechanisms of carbon nano-flake balls growth by laser ablation and microwave plasma chemical vapor deposition
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2021-09-02 |
| Journal | Surface and Coatings Technology |
| Authors | Yue-Zhen Huang, Shih-Chun Tseng, YiāHung Chen, HungāYin Tsai |
| Institutions | Minghsin University of Science and Technology, Industrial Technology Research Institute |
| Citations | 5 |
Abstract
Section titled āAbstractāThe role of laser ablation (LA) for synthesis of carbon nano-flake balls (CNFBs) in microwave plasma chemical vapor deposition (MPCVD) has been investigated. In this article, a systematic study in frequency, speed, pulse width and processing time of LA were conducted in order to identify the role of LA and find an optimized condition window of the growth process. In addition, the study also demonstrates the nucleation and growth mechanism of CNFBs through Optical Emission Spectroscopy (OES), high-resolution transmission electron microscopy (HRTEM), and electron energy loss spectroscopy (EELS) observation on the spacing between graphite and diamond and the SiC interface between Si and diamond site. The defect areas, which are caused by HĪ± etching, react with carbon atoms to form a layer of SiC film, then followed by the increasing amount of CH and CN-C2 radicals, forming diamond nanoparticle and graphite, respectively. In other words, the growth of CNFBs is the near simultaneity of the formation of diamond nanoparticle and the growth process (diamond and graphite). It is discovered that the existence of defects on the silicon substrate and the silicon carbide (SiC) layer after LA are the key factors of growing CNFBs.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
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