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6CCVD Research

Investigation of the morphological and fractal behavior at nanoscale of patterning lines by scratching in an atomic force microscope

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2021-11-01
JournalMicroscopy Research and Technique
AuthorsHenrique Duarte da Fonseca Filho, M. P. Pires, P. L. Souza, Robert S. Matos, R. Prioli
InstitutionsPontifĆ­cia Universidade CatĆ³lica do Rio de Janeiro, Universidade Federal do Amazonas
Citations7

Abstract

Section titled ā€œAbstractā€

Abstract In this work, the topographical effect of the scratching trajectory and the feed direction on the formation of lithographed lines on the (001) InP surface was investigated using an atomic force microscope (AFM) tipā€based nanomachining approach. Nanoscratching tests were carried out using the sharp face of a diamond AFM tip in contact mode. From the topographic maps obtained by AFM, several morphological and fractal parameters were obtained and analyzed. Surface morphology presented a surface smoothing for surfaces with scratches produced in [011] and [001] directions. The height parameters confirmed this behavior because scratches in [001] direction exhibited lower roughness. Moreover, this scratch direction promoted the height distribution most symmetrical and platykurtic. The other morphological parameters revealed that this direction provided a more irregular surface (smaller S mc and S xp ), peak distribution, denser and pointed, smaller portion of material in the core, less deep furrows, higher spatial frequency components, and high isotropy. Fractal parameters revealed that FRE90 has the highest spatial complexity, it is dominated by higher spatial frequencies, and has the lowest surface percolation. Furthermore, all samples exhibited high topographic uniformity.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 1933 - Specifying surface quality
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  3. 2013 - The areal field parameters, in: Characterisation of areal surface texture [Crossref]
  4. 2010 - Materials science and engineering: An introduction

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