Design and analysis of SAW pressure sensing element based on IDT/AlN/Mo/diamond multilayered structure
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2022-01-01 |
| Journal | Acta Acustica |
| Authors | Xiaoxin Ma, Qiang Xiao, Yanping Fan, Xiaojun Ji |
| Institutions | ORCID, Shanghai Jiao Tong University |
Abstract
Section titled āAbstractāThe multilayer structure of surface acoustic wave sensor is an important development direction of surface acoustic wave devices in recent years. In this paper, the IDT/AlN/Mo/diamond structure of surface acoustic wave pressure sensing element is modeled and simulated. The influence of the thickness of AlN and IDT on pressure coefficient frequency and K 2 were simulated and analyzed. The performance of surface acoustic wave pressure sensing element is compared when the metal layer is Mo, no metal layer and the metal layer is Pt. Finally, the relationship between frequency variation and pressure of the designed multilayer surface acoustic wave pressure sensing element is obtained. This research provides a good guidance for the design of surface acoustic wave pressure sensor.