Method of Diamond-Like Coatings Obtaining
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2022-02-15 |
| Journal | Key engineering materials |
| Authors | R V Chkalov, D G Chkalova |
| Institutions | Vladimir State University |
Abstract
Section titled āAbstractāThe article is devoted to the method of obtaining a diamond-like coating on a silicon substrate by laser ablation of a glassy carbon target in a vacuum. The presented technology makes it possible to achieve the synthesis of wear-resistant thin-film coatings with a thickness of about 200 nm. The diagnostics of the obtained coating was carried out using probe microscopy, the chemical and phase composition was estimated by the Raman spectra.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
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