Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2023-01-23 |
| Journal | NCSU Libraries Repository (North Carolina State University Libraries) |
| Authors | Dieter M Gruen, HansāGerd Busmann, Eva-Maria Meyer, Orlando Auciello, Alan R Krauss |
| Institutions | Downers Grove Public Library |
Abstract
Section titled āAbstractāMEMS structure and a method of fabricating them from ultrananocrystalline diamond films having average grain sizes of less than about 10 nm and feature resolution of less than about one micron . The MEMS structures are made by contacting carbon dimer species with an oxide substrate forming a carbide layer on the surface onto which ultrananocrystalline diamond having average grain sizes of less than about 10 nm is deposited. Thereafter, microfabrication process are used to form a structure of predetermined shape having a feature resolution of less than about one micron.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal Sourceā- DOI: None