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RF-MEMS capacitive switches with high reliability

MetadataDetails
Publication Date2023-01-23
JournalOSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)
AuthorsCharles L. Goldsmith, Orlando Auciello, John A. Carlisle, Suresh Sampath, Anirudha V. Sumant
Citations3

A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.