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150 GHz High-Power Photodiode by Flip-Chip Bonding

MetadataDetails
Publication Date2023-08-15
JournalJournal of Lightwave Technology
AuthorsChao Wei, Xiaojun Xie, Ziyun Wang, Yake Chen, Zhongming Zeng
InstitutionsSouthwest Jiaotong University, Ministry of Science and Technology of the People’s Republic of China
Citations22

We report high-power modified uni-traveling carrier photodiodes with 150-GHz bandwidth. To improve the RF output power, the photodiode chips are flip-chip bonded on diamond submounts with high thermal conductivity to enhance heat dissipation. Measured 3-dB bandwidths of 4-μm, 6-μm, 8-μm, and 10-μm diameter photodiodes reach 150 GHz, 129 GHz, 117 GHz, and 105 GHz, respectively. RF output power with 12.7 dBm at 90 GHz, 11.3 dBm at 100 GHz, 8.5 dBm at 110 GHz, āˆ’3 dBm at 150 GHz, and āˆ’5.7 dBm at 165 GHz are achieved.