Imaging Extreme Ultraviolet Radiation Using Nanodiamonds with Nitrogen-Vacancy Centers
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2023-09-14 |
| Journal | Nano Letters |
| Authors | TengāI Yang, Yuen Yung Hui, JenāIu Lo, YuāWen Huang, YināYu Lee |
| Institutions | Tzu Chi University, Tzu Chi Foundation |
| Citations | 8 |
Abstract
Section titled āAbstractāExtreme ultraviolet (EUV) radiation with wavelengths of 10-121 nm has drawn considerable attention recently for its use in photolithography to fabricate nanoelectronic chips. This study demonstrates, for the first time, fluorescent nanodiamonds (FNDs) with nitrogen-vacancy (NV) centers as scintillators to image and characterize EUV radiations. The FNDs employed are ā¼100 nm in size; they form a uniform and stable thin film on an indium-tin-oxide-coated slide by electrospray deposition. The film is nonhygroscopic and photostable and can emit bright red fluorescence from NV<sup>0</sup> centers when excited by EUV light. An FND-based imaging device has been developed and applied for beam diagnostics of 50 nm and 13.5 nm synchrotron radiations, achieving a spatial resolution of 30 Ī¼m using a film of ā¼1 Ī¼m thickness. The noise equivalent power density is 29 Ī¼W/(cm<sup>2</sup> Hz<sup>1/2</sup>) for the 13.5 nm radiation. The method is generally applicable to imaging EUV radiation from different sources.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
Section titled āReferencesā- 2018 - EUV Lithography [Crossref]