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Single Layer Control of Nanoscale Metal–Insulator Transition at the LaAlO3/SrTiO3 Interface

MetadataDetails
Publication Date2024-09-19
JournalNano Letters
AuthorsDawei Qiu, Changjian Ma, Danqing Liu, Zhiyuan Qin, Qianyi Zhao
InstitutionsUniversity of Science and Technology of China
Citations3

Modern quantum device fabrication often requires precisely adding and removing materials <i>in situ</i> at nanoscales, which is challenging for high-quality correlated oxide devices. In this work, we present a novel nanofabrication method that remotely controls the interfacial metal-insulator transition at the LaAlO<sub>3</sub>/SrTiO<sub>3</sub> interface by selectively removing an LaAlO<sub>3</sub> overlayer using a diamond tip. Remarkably, we observe a large force window within which single atomic layer precision of control is achievable. Our results confirm the critical thickness and charge transfer mechanism through a layer-by-layer removal process at the interface. Additionally, high-quality nanodevices, including nanochannels and single electron transistors, are successfully fabricated using this method. This nonvolatile and high-precision nanofabrication method provides a promising oxide platform for quantum engineering by harnessing the rich electron correlations at the nanoscale.