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6CCVD Research

Development of embedded graphitic-sandwich structures in single-crystal synthetic diamond via ultrafast laser micromachining

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2024-11-01
JournalJournal of Laser Applications
AuthorsBrian K. Canfield, Alexander S. Terekhov, Trevor Moeller, Leverson F. L. Costa, D.V. Kerns
InstitutionsMedtronic (United States), University of Tennessee at Knoxville
Citations1

Abstract

Section titled ā€œAbstractā€

We discuss the direct fabrication of embedded, graphitized features within high-purity, synthetic single-crystal diamond through ultrafast laser micromachining for the purpose of developing diamond-based capacitive structures. As an incorporating substrate, carbon in the form of highly pure synthetic diamond offers numerous advantageous physicochemical properties, including hardness, durability, optical transparency, and extremely high electrical resistance. On the other hand, graphitic carbon can exhibit exceptionally low electrical resistance. A simple sandwich structure of a thin sheet of diamond between two sheets of graphite could, therefore, form a simple plate-type capacitive structure. For a single structure consisting of 1 Ī¼m thick plates with areal dimensions of 5 Ɨ 1 mm2 and 1 Ī¼m gaps between plates, we estimate a capacitance of 240 pF, with a 3 kV/Ī¼m breakdown voltage in diamond. āˆ¼2500 plates thus fabricated in a āˆ¼5 Ɨ 5 Ɨ 1 mm3 diamond chip could, therefore, store āˆ¼300 mJ of energy. To realize this kind of structure, we employ ultrafast laser micromachining with high numerical aperture focusing and precise positioning control to disrupt the crystalline matrix of a well-confined volume within single-crystal synthetic diamond, forming embedded graphitic features. Graphitized plate regions 1 Ī¼m thick with 1 Ī¼m separations can be fabricated in this manner, and empirical I-V measurements indicate resistances in the plates as low as āˆ¼kĪ©. We also address challenges involved with fabricating closely parallel, embedded graphitic plates in thick diamond substrates, including aberration, machining time, and cracking.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2019 - Femtosecond laser written photonic and microfluidic circuits in diamond [Crossref]
  2. 2019 - Polycrystalline diamond photonic waveguides realized by femtosecond laser lithography [Crossref]
  3. 2018 - Realization of deep 3D metal electrodes in diamond radiation detectors [Crossref]
  4. 2007 - Radiation hardness of diamond and silicon sensors compared [Crossref]
  5. 2013 - A novel detector with graphitic electrodes in CVD diamond [Crossref]
  6. 2015 - A 3D diamond detector for particle tracking [Crossref]
  7. 2015 - Radiation hardness of three-dimensional polycrystalline diamond detectors [Crossref]
  8. 2013 - Radiation damage in the diamond based beam condition monitors of the CMS experiment at the Large Hadron Collider (LHC) at CERN [Crossref]
  9. 2016 - A 3D diamond detector for particle tracking [Crossref]
  10. 2016 - Diamond pixel detectors and 3D diamond devices [Crossref]

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