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Advanced thermal boundary resistance measurement techniques for thick-film diamond heterostructures

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2025-01-06
JournalApplied Physics Letters
AuthorsXiaozhuang Lu, Q. B. Liu, Cui Yu, Shiwei Feng, Zhihong Feng
InstitutionsHebei Semiconductor Research Institute, Beijing University of Technology
Citations1

Abstract

Section titled ā€œAbstractā€

With the miniaturization of electronic devices, thermal management has become a critical challenge, especially for high-power systems where efficient heat dissipation is essential. Polycrystalline diamond films, renowned for their exceptional thermal conductivity, offer a promising solution. However, the thermal boundary resistance (TBR) at the diamond/substrate interface remains a significant bottleneck, severely impacting heat dissipation efficiency. This study presents a measurement approach tailored for quantifying TBR in thick-film diamond heterostructures, focusing on diamond-on-silicon (Diamond-on-Si) systems with a silicon nitride barrier layer. Compared to conventional methods, such as transient thermoreflectance techniques, which often exhibit limited sensitivity for thick layers, this approach demonstrates greater reliability and applicability. The findings establish a foundation for advancing strategies to reduce TBR and improve the thermal management performance of diamond films in high-power electronic applications.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2020 - Ultrahigh thermal conductivity in isotope-enriched cubic boron nitride [Crossref]
  2. 2021 - Heat management with a twist in layered materials [Crossref]
  3. 2021 - Measuring phonon dispersion at an interface [Crossref]
  4. 2023 - A review of thermal properties of CVD diamond films [Crossref]
  5. 2016 - Control of the in-plane thermal conductivity of ultra-thin nanocrystalline diamond films through the grain and grain boundary properties [Crossref]
  6. 2017 - Optical characterization and thermal properties of CVD diamond films for integration with power electronics [Crossref]
  7. 2013 - Nanocrystalline diamond-gated AlGaN/GaN HEMT [Crossref]
  8. 2012 - The properties and applications of nanodiamonds [Crossref]
  9. 2018 - Low thermal boundary resistance interfaces for GaN-on-diamond devices [Crossref]
  10. 2017 - Thermal characterization of polycrystalline diamond thin film heat spreaders grown on GaN HEMTs [Crossref]

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