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Development of Fluorescent Diamond Sensors for EUV/Soft X-ray Imaging

MetadataDetails
Publication Date2025-05-01
JournalJournal of Physics Conference Series
AuthorsTzu-Ping Huang, Yu-Hsin Yang, Yu‐Chan Lin, Yi-Jr Su, Yin‐Yu Lee

Abstract This study highlights the use of fluorescent diamonds (FDs) with nitrogen-vacancy (NV) center as scintillators for imaging in the extreme ultraviolet (EUV) to soft X-ray range. The FDs exhibit a wide absorption band spanning from 80 to 1200 eV, while maintaining consistent emission spectra. Under synchrotron radiation excitation, the FDs emit orange fluorescence and demonstrate exceptional resistance to radiation. These results indicate that FDs could be highly valuable for EUV lithography and soft X-ray detection applications.

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