Surface desorption properties of hydrogen-terminated diamond detected by micromechanical resonator
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2025-06-02 |
| Journal | Applied Physics Letters |
| Authors | Keyun Gu, Zilong Zhang, Jian Huang, Yasuo Koide, Satoshi Koizumi |
| Institutions | Shanghai University, National Institute for Materials Science |
Abstract
Section titled āAbstractāDiamond, with its ultra-wide bandgap energy, has emerged as an extreme semiconductor due to its extraordinary electronic and thermal properties. The hydrogen-terminated diamond surface has attracted extensive attention due to its unique p-type surface conductivity. However, the fundamental nature of this p-type conductivity remains incompletely understood using existing surface analysis techniques. In this study, we investigate the dynamic thermal desorption of surface adsorbates on hydrogen-terminated diamond using single-crystal diamond microelectromechanical systems resonators, avoiding charging-related issues. By analyzing variations in resonance performance and surface conductivity, we uncover several key findings: (i) The desorption of surface adsorbates reaches saturation at approximately 873 K. (ii) The desorbed mass per unit area is around 2.3 fg/Ī¼m2, corresponding to an equivalent thickness of approximately 1 nm. (iii) The surface conductivity of hydrogen-terminated diamond can be fully restored even after annealing at 873 K, indicating the thermal stability of C-H bonds. This work offers an alternative insight into the surface properties of hydrogen-terminated diamond, accelerating the development of highly reliable diamond-based electronic devices.