Skip to content

Toward All‐Carbon Electronics Buried in Diamond

MetadataDetails
Publication Date2025-09-27
JournalAdvanced Electronic Materials
AuthorsCalum S. Henderson, Patrick S. Salter, Emil T. Jonasson, Richard B. Jackman
InstitutionsUnited Kingdom Atomic Energy Authority, London Centre for Nanotechnology
AnalysisFull AI Review Included

This research demonstrates a paradigm-shifting approach to diamond electronics by fabricating functional, all-carbon nanocarbon networks (NCNs) buried within bulk diamond using femtosecond laser processing.

  • Novel Fabrication: Femtosecond laser writing enables the creation of complex, 3D electrically active architectures (NCNs) deep inside the diamond substrate, circumventing the challenges associated with traditional substitutional doping (e.g., deep states, poor interface stability).
  • Tunable Electrical Properties: By varying the laser Pulse Repetition Rate (PRR), the electrical behavior of the NCNs can be precisely tuned:
    • 1 kHz PRR yields Ohmic, semi-metallic conduction (graphitic character).
    • 1 MHz PRR yields highly resistive, semiconductive behavior (Ea ≈ 0.54 eV).
    • 1 kHz overwritten by 1 MHz (PRR-1k1M) yields ambipolar/pseudo-diode behavior with a high rectification ratio (>5500).
  • Device Stability: The laser-written pseudo-diodes demonstrated high stability, maintaining a rectification ratio greater than three orders of magnitude over 120 repeated voltage sweeps.
  • Proof-of-Concept Transistor: A fully buried, all-carbon Field Effect Transistor (FET) architecture was successfully fabricated, utilizing the ambipolar NCN material as the channel and a separate NCN structure as the gate.
  • Material Composition: The semiconductive and ambipolar NCNs are hypothesized to contain a ‘diaphite’ phase—an extended diamond-graphite interface—which provides a tunable bandgap under the strain of the surrounding crystalline diamond.
ParameterValueUnitContext
PRR-1k Resistance76 ± 8Ohmic NCN columns
PRR-1k Activation Energy (Ea)4.9 ± 0.2meVSemi-metallic conduction
PRR-1k Resistivity (Sheet Model)1.3 x 10-5ΩmComparable to crystalline graphite
PRR-1M Resistance>1Highly resistive NCN columns
PRR-1M Activation Energy (Ea)0.54 ± 0.02eVSemiconductive behavior (0V DC bias)
PRR-1k1M Rectification Ratio (Peak)>5500RatioPseudo-diode structure
PRR-1k1M Ea (Tunable Range)17 ± 3 to 600meVTunable via DC bias (-30V to +30V)
FET Maximum Current Density (JMax)52.5µA/µm2At VG = -20 V
FET Maximum Transconductance (gm)39.0(1)nSProof-of-concept device
FET Gate-Channel Separation5µmIntrinsic diamond layer
Diamond Substrate GradeB < 1 ppb, N < 10 ppbConcentrationElectronic grade CVD diamond
Contact Annealing Temperature600°CTi/Pt/Au Ohmic contact formation
PRR-1k/1M Laser Wavelength515nmLight Conversion Pharos system
PRR-1k/1M Pulse Energy/Duration120 nJ / 170 fsEnergy / TimeUsed for vertical columns
FET Gate Laser Wavelength790nmSpectra Physics Solstice system
FET Gate Pulse Energy/Duration110 nJ / 250 fsEnergy / TimeUsed for 3D gate structure

The fabrication process relies on two distinct femtosecond laser systems and specific post-processing steps:

  1. Vertical NCN Column Fabrication (PRR-1k, PRR-1M, PRR-1k1M):

    • Laser System: Light Conversion Pharos (Yb:KGW).
    • Wavelength/Energy: 515 nm, 120 nJ pulse energy, 170 fs pulse duration.
    • Focusing: Zeiss 20x objective (0.5 NA), resulting in a spot size of 0.6 µm (x,y) and 9.8 µm (z).
    • Writing Process: The laser spot was drawn upwards from the seed side (bottom) to the laser side (top) at a speed of 10 µm/s.
    • PRR Variation:
      • PRR-1k: 1 kHz (Ohmic conductive).
      • PRR-1M: 1 MHz (Semiconductive, highly resistive).
      • PRR-1k1M: Initial 1 kHz write, followed by an overwrite using 1 MHz PRR (Ambipolar/Diode).
  2. 3D Gate Structure Fabrication (FET):

    • Laser System: SpectraPhysics Solstice (Ti:Sapphire).
    • Wavelength/Energy: 790 nm, 110 nJ pulse energy, 250 fs pulse duration.
    • Focusing: 1.4 NA oil-immersion objective, achieving tighter axial confinement (spot size 0.3 µm (x,y) and 2 µm (z)).
    • Structure: A cage-like gate structure was written, separated from the central channel by 5 µm of intrinsic diamond.
  3. Post-Processing and Contacting:

    • Cleaning: Substrates were cleaned in a boiling acid solution (H2SO4:(NH4)2SO4) at 200 °C for 20 minutes.
    • Surface Passivation: Ozone treatment (200 °C, 50 mbar, 1 hour) was used to oxygen-terminate the surface, preventing surface transfer doping (STD) and isolating the devices.
    • Ohmic Contacts: Ti/Pt/Au (20:5:200 nm) contacts were deposited on the laser-written features via electron-beam evaporation and photolithographic lift-off.
    • Annealing: Contacts were annealed at 600 °C in vacuum for 1 hour to ensure reliable Ohmic behavior.

The development of robust, buried, all-carbon electronics in diamond addresses critical needs in extreme environment and high-power applications, leveraging diamond’s superior physical properties.

  • High-Power Electronics:
    • Fabrication of robust, high-breakdown voltage Schottky diodes and FETs (using PRR-1k1M and PRR-1k NCNs).
    • Enables true vertical device design by replacing metallic surface connections with protected, sub-surface graphitic channels, improving reliability and breakdown voltage.
  • Extreme Environment Sensing and Control:
    • Radiation Hardness: Ideal for nuclear facilities, space, and high-energy physics, where diamond’s inherent radiation tolerance is critical.
    • High-Temperature Operation: The high activation energies observed (up to 0.58 eV) suggest suitability for electronics operating at elevated temperatures where conventional silicon or surface-doped diamond fails.
  • Integrated Circuits (ICs):
    • The ability to create complex, 3D buried architectures (like the FET gate) allows for the development of complete, robust, all-carbon integrated circuits entirely encapsulated within the diamond substrate.
  • Advanced Detectors:
    • The NCN structures can be used to create highly stable diamond-based radiation detectors, combining the sensitivity of thin active regions with the stability of thick diamond substrates.
View Original Abstract

Abstract This work investigates the use of femtosecond laser processing to fabricate various nanocarbon structures with distinct electrical behaviors within diamond substrates. Conventional approaches for achieving diamond doping have significant disadvantages, including challenging growth profiles, limited environmental stability, and sub‐optimal psuedo‐vertical structures. Here, it is demonstrated that laser‐written nanocarbon networks (NCNs) directly alleviate these issues, demonstrating the highly repeatable fabrication of robust and precise electrical architectures buried in diamond with proven stability over repeated temperature and voltage cycling. By varying the laser pulse repetition rate (PRR), a transition from Ohmic conductive to semiconductive/ambipolar behavior is achieved in the modified diamond. Furthermore, a proof‐of‐concept, all‐carbon transistor architecture buried within the bulk diamond is presented, showcasing the potential for integrated device fabrication using the laser‐writing process.

  1. 2007 - Physica Status Solidi (A) Applications and Materials Science
  2. 2018 - Journal of Instrumentation