Skip to content

Gan-on-diamond wafers - Recent developments

MetadataDetails
Publication Date2015-03-01
AuthorsFelix Ejeckam, Daniel Francis, Firooz Faili, Frank Lowe, Daniel J. Twitchen
InstitutionsElement Six (United States)
Citations4

In this work, we discuss the state-of-the-art of GaN-on-diamond wafer technology at Element Six. We report our recent demonstration of 100mm (4ā€) GaN-on-diamond HEMT epitaxial wafers-with the highest thermal conductivity of diamond (>1500 W/mK) yet. The wafers exhibit <;20μm bow mounted on-carrier, sheet resistivity of <;450 Ohms/sq, and CV specs that are in-line with industry expectations.

  1. 2014 - 3,000+ Hours Continuous Operation of GaN-on-Diamond HEMTs at 350C Channel Temperature
  2. 2013 - Wafer-Scale GaN HEMT Performance Enhancement by Diamond Substrate Integration
  3. 2014 - Analysis and Characterization of Thermal Transport in GaN HEMTs on SiC and Diamond Substrates