Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF6 plasma treatment
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2015-03-16 |
| Journal | Applied Physics Letters |
| Authors | Christian Osterkamp, Johannes Lang, Jochen Scharpf, Christoph MĆ¼ller, Liam P. McGuinness |
| Institutions | UniversitƤt Ulm |
| Citations | 48 |
Abstract
Section titled āAbstractāHere we report the fabrication of stable, shallow (<5 nm) nitrogen-vacancy (NV) centers in diamond by nitrogen delta doping at the last stage of the chemical vapor deposition growth process. The NVs are stabilized after treating the diamond in SF6 plasma, otherwise the color centers are not observed, suggesting a strong influence from the surface. X-ray photoelectron spectroscopy measurements show the presence of only fluorine atoms on the surface, in contrast to previous studies, indicating very good surface coverage. We managed to detect hydrogen nuclear magnetic resonance signal from protons in the immersion oil, revealing a depth of the NVs of about 5 nm.