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6CCVD Research

High- $Q$ UHF Spoke-Supported Ring Resonators

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2015-11-12
JournalJournal of Microelectromechanical Systems
AuthorsThura Lin Naing, Tristan O. Rocheleau, Zeying Ren, Shengā€Shian Li, Clark T.ā€C. Nguyen
InstitutionsUniversity of California, Berkeley, University of Michigan
Citations34

Abstract

Section titled ā€œAbstractā€

A vibrating micromechanical spoke-supported ring resonator employing a central peg-anchor, balanced non-intrusive quarter-wavelength extensional support beams, and notched support attachments attains high Q-factor in vacuum, posting 10000 at 441 MHz when made of polysilicon structural material and 42900 at 2.97 GHz when made of microcrystalline diamond. The latter marks the highest f Ā· Q of 1.27Ɨ10 <sup xmlns:mml=ā€œhttp://www.w3.org/1998/Math/MathMLā€ xmlns:xlink=ā€œhttp://www.w3.org/1999/xlinkā€&gt;14&lt;/sup> for any acoustic resonator at room temperature, besting even macroscopic bulk-mode devices. Very high Q values like these in a device occupying only 870 Ī¼m <sup xmlns:mml=ā€œhttp://www.w3.org/1998/Math/MathMLā€ xmlns:xlink=ā€œhttp://www.w3.org/1999/xlinkā€&gt;2&lt;/sup> pave a path toward on-chip realizations of RF channelizers and ultra-low phase-noise gigahertz oscillators for secure communications. With frequency determined by lithographically defined ring-width rather than radius, a capacitive transducer with a 75-nm gap allows this 2.97-GHz version to achieve a series motional resistance of 81 kQ. Though still higher than desired, this marks a 30Ɨ improvement over previous pure polysilicon surface-micromachined solid disk resonators in the gigahertz range, and if predicted performance-scaling holds true, seven such resonators constructed in a mechanically coupled array with 30-nm gap spacing, could lower this to only 300 Ī©. Confidence in a prediction like this stems from the confirmed accuracy of the electrical equivalent circuit described herein that models not only the ring and its transducers, but also its supports.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2010 - GHz range nanoscaled AlN contour-mode resonant sensors (CMR-S) with self-sustained CMOS oscillator
  2. 2004 - Phase noise amplitude dependence in self-limiting wine-glass disk oscillators
  3. 2005 - Low phase noise array-composite micromechanical wine-glass disk oscillator

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