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Study on capacitance–voltage characteristics of diamond field-effect transistors with NO2 hole doping and Al2O3 gate insulator layer

MetadataDetails
Publication Date2016-02-29
JournalJapanese Journal of Applied Physics
AuthorsMakoto Kasu, Kazuyuki Hirama, Kazuya Harada, Toshiyuki Oishi
InstitutionsSaga University, NTT Basic Research Laboratories
Citations23

Abstract We study the capacitance-voltage ( C - V ) characteristics of thermally stable high-performance diamond field-effect transistors (FETs) with NO 2 hole doping and an Al 2 O 3 gate insulator layer. We measured C - V characteristics and obtained the results reproducibly. Then, we fitted the experimental C - V results by solving the Poisson equations self-consistently, and determined the interface parameters such as the interface fixed charge and interface states. On the basis of the results, we constructed band diagrams of the metal-oxide-semiconductor structure in a diamond FET and explained the interface properties.