H-terminated diamond field effect transistor with ferroelectric gate insulator
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2016-06-13 |
| Journal | Applied Physics Letters |
| Authors | Ryota Karaya, Hiroki Furuichi, T. Nakajima, Norio Tokuda, Takeshi Kawae |
| Institutions | Tokyo University of Science, Kanazawa University |
| Citations | 7 |
Abstract
Section titled āAbstractāAn H-terminated diamond field-effect-transistor (FET) with a ferroelectric vinylidene fluoride (VDF)-trifluoroethylene (TrFE) copolymer gate insulator was fabricated. The VDF-TrFE film was deposited on the H-terminated diamond by the spin-coating method and low-temperature annealing was performed to suppress processing damage to the H-terminated diamond surface channel layer. The fabricated FET structure showed the typical properties of depletion-type p-channel FET and showed clear saturation of the drain current with a maximum value of 50 mA/mm. The drain current versus gate voltage curves of the proposed FET showed clockwise hysteresis loops due to the ferroelectricity of the VDF-TrFE gate insulator, and the memory window width was 19 V, when the gate voltage was swept from 20 to ā20 V. The maximum on/off current ratio and the linear mobility were 108 and 398 cm2/V s, respectively. In addition, we modulated the drain current of the fabricated FET structure via the remnant polarization of the VDF-TrFE gate and obtained an on/off current ratio of 103 without applying a DC gate voltage.