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6CCVD Research

TCAD-based investigation on transport properties of Diamond-like carbon coatings for HV-ICs

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2016-12-01
AuthorsSusanna Reggiani, C. Giordano, A. Gnudi, Elena Gnani, G. Baccarani
InstitutionsUniversity of Bologna, ABB (Switzerland)
Citations8

Abstract

Section titled ā€œAbstractā€

A TCAD-based approach is proposed to investigate the most relevant transport mechanisms of diamond-like carbon (DLC) films at different biases and ambient temperatures. Starting from the band structure and boundary conditions of a metal-insulator-metal (MIM) device, the most relevant trap levels have been determined against experiments along with the Poole-Frenkel conduction effect. The affinity of the DLC under study has been extracted from experiments on the corresponding metal-insulator-semiconductor (MIS) diode. A clear polarization effect has been found in the measured C-V curves at different frequencies. The latter has been modeled in the TCAD tool via the Debye equation leading to a nice agreement with experiments.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2008 - Space-charge-limited currents in organic films: Some open problems
  2. 2010 - Sentaurus device simulator (release D-2010.03)

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