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Rectangular photonic crystal nanobeam cavities in bulk diamond

MetadataDetails
Publication Date2017-07-10
JournalApplied Physics Letters
AuthorsSara Mouradian, Noel H Wan, Tim Schrƶder, Dirk Englund
InstitutionsUniversity of Copenhagen, Massachusetts Institute of Technology
Citations98

We demonstrate the fabrication of photonic crystal nanobeam cavities with rectangular cross section into bulk diamond. In simulation, these cavities have an unloaded quality (Q) factor of over 1 Ɨ 106. Measured cavity resonances show fundamental modes with spectrometer-limited Q factors ≄14Ɨ103 within 1 nm of the nitrogen vacancy centers zero phonon line at 637 nm. We find high cavity yield across the full diamond chip with deterministic resonance trends across the fabricated parameter sweeps.