Selection of materials for multilayered structures to be used in packageless sensors
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2017-09-01 |
| Journal | 2017 IEEE International Ultrasonics Symposium (IUS) |
| Authors | Natalya Naumenko |
| Institutions | National University of Science and Technology |
| Citations | 2 |
Abstract
Section titled āAbstractāRecently a multilayered structure with a low-velocity layer sandwiched between two high-velocity materials, one of which also works as a supporting substrate and another one as a coat isolating the wave from the influence of undesired external factors, was suggested for application in packageless sensors [1,2]. The thickness of a middle piezoelectric layer must be sufficient to confine the wave within this layer. The suggested combinations of materials included ZnO or GaN as a waveguiding layer, sapphire or diamond as a supporting substrate and Al <sub xmlns:mml=āhttp://www.w3.org/1998/Math/MathMLā xmlns:xlink=āhttp://www.w3.org/1999/xlinkā>2</sub> O <sub xmlns:mml=āhttp://www.w3.org/1998/Math/MathMLā xmlns:xlink=āhttp://www.w3.org/1999/xlinkā>3</sub> (alumina) or AlN as a coating. In the present work, two previously reported structures were analyzed and compared to find the selection criterion for optimal combination of materials enabling high coupling of the useful mode and suppression of parasitic modes.