Effect of High-Fluence Ion Irradiation on the Structure and Electrical Properties of Polycrystalline Diamond
At a Glance
Section titled “At a Glance”| Metadata | Details |
|---|---|
| Publication Date | 2018-07-01 |
| Journal | Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques |
| Authors | Vasiliy Anikin, А. М. Борисов, В. А. Казаков, А. В. Кудрин, Е. С. Машкова |
| Institutions | Moscow Aviation Institute, Keldysh Institute of Applied Mathematics |
| Citations | 3 |
Abstract
Section titled “Abstract”The results of experimental investigation of the surface layer of polycrystalline diamond modified by high-fluence (≥1018 cm-2) 30-keV Ar+ ion irradiation are presented. The reflection high-energy electron diffraction (RHEED) patterns, Raman spectra, and temperature dependences of the electrical resistance are analyzed. It is found that depending on the irradiation conditions and temperature treatment of diamond a modified layer is formed with either a disorderd structure and semiconductor conductivity or the graphite structure and metallic conductivity.