Ultra-thin Carbon Nanomechanical Resonator Fabrication and Its Dynamic Property Characterization
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2019-03-07 |
| Journal | Sensors and Materials |
| Authors | Reo Kometani, Mizue Sekine, Shinâichi Warisawa |
| Institutions | The University of Tokyo |
Abstract
Section titled âAbstractâdiamond-like carbon (DLC), Q factor, energy dispersion, focused ion beam (FIB) The nanomechanical resonator is a usef ul st r uct ure to achieve various nanoelectromechanical systems (NEMS) sensing devices.In this study, systematic evaluations of the dynamic properties and mechanical material properties of an ultra-thin nanomechanical resonator made of diamond-like carbon (DLC) were carried out.As a result, the fabrication of an ultra-thin nanomechanial resonator with a thickness of 4.8-73 nm was achieved by focusedion-beam (FIB)-based nanofabrication.The energy dispersion of vibration depended on the surface area/volume (S/V) ratio.A thinner nanomechanical resonator had higher sensitivity to pressure.Furthermore, we evaluated Youngâs modulus and density as mechanical material properties by measuring the resonant properties of the DLC/SiO 2 bilayer mechanical resonator.Youngâs modulus and density increased with decreasing thickness.This implied that the mechanical properties of nanoscale-thick DLC have a thickness dependence.